PD ISO/TR 19319:2013 PDF
Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Дата публикации:
- 31 марта 2013 г.
- ICS:
- 71.040.40
- SKU:
- PD ISO/TR 19319:2013
Abstract
1 Scope This Technical Report describes:
a) Functions and their relevance to lateral resolution :
-
Point spread function ( PSF ) — see 4.1.1
-
Line spread function ( LSF ) — see 4.1.2
-
Edge spread function ( ESF ) — see 4.1.3
-
Modulation transfer function (MTF) — see 4.1.4
-
Contrast transfer function ( CTF ) — see 4.1.5.
b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution :
...
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