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Overview ISO 5618-1:2023 - part of the ISO 5618 series on fine/advanced ceramics - defines a standardized classification of surface defects that occur on single-crystal gallium nitride (GaN) substrat…
1 Scope This document gives a classification of the dislocations and process-induced defects, from among the various surface defects, that occur on single-crystal gallium nitride ( GaN ) substrates o…