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Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflec…

Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-refle…

Overview ISO 14706:2014 specifies a standardized TXRF (total‑reflection X‑ray fluorescence) method for quantifying surface elemental contamination on silicon wafers. The method targets chemomechanica…