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Surface chemical analysis. Secondary ion mass spectrometry. Correction method for saturated intensity in sing…

Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in si…

Overview ISO 20411:2018 specifies a practical method to evaluate and correct saturated intensity in single‑ion counting dynamic secondary ion mass spectrometry (SIMS). The standard targets pulse‑coun…

BS ISO 20411 Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated in…