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Overview ISO 5618-2:2024 - "Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for GaN crystal surface defects - Part 2: Method for determining etch pit density" - defines a…
1 Scope This document describes a method for determining the etch pit density, which is used to detect dislocations and processing-introduced defects that occur on single-crystal GaN substrates or si…