SIST EN ISO 14644-1:2016 PDF
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 46
- Дата публикации:
- 26 января 2016 г.
- ICS:
- 13.040.35
- Технический комитет:
- I13 - Imaginarni 13
ISO 14644-1:2015 specifies the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones; and separative devices as defined in ISO 14644‑7. Only particle populations having cumulative distributions based on threshold (lower limit) particle sizes ranging from 0,1 µm to 5 µm are considered for classification purposes. The use of light scattering (discrete) airborne particle counters (LSAPC) is the basis for determination of the concentration of airborne particles, equal to and greater than the specified sizes, at designated sampling locations. ISO 14644-1:2015 does not provide for classification of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1 µm) will be addressed in a separate standard to specify air cleanliness by nano-scale particles. An M descriptor (see Annex C) may be used to quantify populations of macroparticles (particles larger than 5 µm). ISO 14644-1:2015 cannot be used to characterize the physical, chemical, radiological, viable or other nature of airborne particles.
Abstract
Overview
EN ISO 14644-1:2015 - "Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration" (CEN adoption of ISO 14644-1:2015) defines how to classify air cleanliness in cleanrooms, clean zones and separative devices by measuring airborne particle concentration. The standard covers particle counting for threshold sizes from 0.1 µm to 5 µm, uses light scattering (discrete) airborne particle counters (LSAPC) as the basis for measurement, and retains an M descriptor for macroparticles (>5 µm). It does not address ultrafine/nano particles (<0.1 µm) or the physical/chemical/viable nature of particles.
Key topics and technical requirements
- Particle size range and classes: Classification is based on cumulative particle concentrations for threshold sizes between 0.1 µm and 5 µm. The standard specifies nine integer ISO classes and intermediate decimal classes.
- Measurement method: Use of LSAPC devices for counting particles equal to or greater than specified sizes at designated sampling points.
- Sampling strategy and statistics: A statistical sampling model (adapted hypergeometric approach) defines the minimum number of sampling locations and the grid-based selection of representative locations. The approach gives at least 95% confidence that 90% of the area will comply with the target class.
- Test documentation: Requirements for demonstration of compliance, reporting and evaluation of airborne particle concentrations are specified; Annex A provides the reference method.
- Macroparticle descriptor: Annex C describes counting and sizing for macroparticles (>5 µm) and use of an “M” descriptor where applicable.
- Scope limitations: Excludes particles
Технические детали
- SKU
- SIST EN ISO 14644-1:2016
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