BS EN ISO 14644-14:2016
ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms - Assessment of suitability for use of equipment by airborne particle concentration
ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms - Assessment of suitability for use of equipment by airborne particle concentration
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Дата публикации:
- 31 октября 2016 г.
- ICS:
- 13.040.35
- Технический комитет:
- CEN
- SKU:
- BS EN ISO 14644-14:2016
Abstract
1 Scope This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment , process equipment , components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).
NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.
The following items are not covered by this part of ISO 14644:
— assessment of suitability with respect to biocontamination;
— testing for suitability of decontamination agents and techniques;
— cleanability of equipment and materials;
— requirements on design of equipment and selection of materials;
— physical properties of materials (e.g. electrostatic, thermal properties);
...
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