BS EN ISO 14644-3:2005

BS EN ISO 14644-3 sets out test methods that may be used for the purpose of characterizing a cleanroom as described and specified in other parts of BS EN ISO 14644 . Statements in this part of ISO 14644 reference the standards of ASTM, CEN, DIN, IEST, JACA, JIS and SEMI. Part 3 of BS EN ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones.  Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. The test methods recommend test apparatus and test procedures for determining performance parameters. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this part of BS EN ISO 14644 may be used if based on agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements. This part of ISO 14644 is not applicable to the measurement of products or of processes in cleanrooms or separative devices. Not all cleanroom parameter test procedures are shown in this part of ISO 14644 . The procedures and apparatus to characterize other parameters, of concern in cleanrooms and clean zones used for specific products or processes, are discussed elsewhere in other documents [for example, procedures for control and measurement of viable materials ( BS EN ISO 14698 ), testing cleanroom functionality ( BS EN ISO 14644-4 ), and testing of separative devices (...