IEC 60747-14-11:2021

Overview

IEC 60747-14-11:2021 specifies test methods, definitions and configurations for evaluating surface acoustic wave (SAW)-based integrated semiconductor sensors used to measure ultraviolet (UV) radiation, illumination (visible light) and temperature. The standard covers terminology, device structure (resonator and delay-line SAW types), and measurement procedures for both DC characteristics and RF characteristics (including direct mode and differential amplifier mode based on feedback oscillation). Devices addressed include integrated multi-light sensor arrays and reference sensor elements; devices governed by TC 49 (piezoelectric/dielectric frequency-control devices) are excluded.

Keywords: IEC 60747-14-11:2021, surface acoustic wave, SAW-based sensors, ultraviolet sensor, visible-light sensor, RF test methods, DC characteristics, frequency shift.

Key Topics and Requirements

• Terms and definitions: Standardized vocabulary for SAW devices, interdigital transducer (IDT), centre frequency, phase shift, frequency shift, insertion loss and related parameters.
• Device structures: Descriptions of SAW resonator and SAW delay-line sensor elements, and integrated multi-light sensor configurations including reference elements to compensate temperature effects.
• Sensitive layers: Guidance on typical semiconductor sensing materials (e.g., ZnO, ZnS for UV; CdS, PbS for visible light) and their role in frequency/phase/delay changes.
• Test conditions: Environmental and setup requirements (e.g., darkroom considerations, starting conditions and instrumentation requirements) to ensure repeatable measurements.
• Measurement methods:
  • DC characteristics: I–V type measurements and evaluation of light-induced DC responses of sensor elements.
  • RF characteristics: Measurement of centre/resonance frequency, frequency shift, phase and insertion loss. Includes two RF measurement modes:
    • Direct mode
    • Differential amplifier mode (based on feedback oscillation) for enhanced sensitivity and noise rejection.
• Performance parameters: Procedures to evaluate hysteresis, frequency shift vs. light on/off states, and other characteristic responses.

Applications and Who Uses It

• Semiconductor manufacturers designing SAW-based UV/illumination/temperature sensors.
• Sensor designers and integrators developing smart lighting, environmental monitoring, industrial IoT, wearable and consumer devices that require compact optical/temperature sensing.
• Test laboratories and quality assurance teams performing compliance, reliability and performance characterization.
• Procurement and regulatory bodies specifying testable performance criteria for SAW-based sensor components.

Practical benefits: standardized, repeatable test procedures for RF/DC performance, improved comparability between devices, and guidance for designing reference and multi-sensor arrays.

Related Standards

• IEC 63041-1 - Piezoelectric sensors: Generic specifications
• IEC 63041-2 - Piezoelectric sensors: Chemical and biochemical sensors

Note: IEC 60747-14-11 excludes devices handled by TC 49 (piezoelectric, dielectric and electrostatic frequency control and detection materials).