IEC 60747-14-3:2009

Overview

IEC 60747-14-3:2009 is an international standard developed by the International Electrotechnical Commission (IEC). This document outlines the requirements for semiconductor pressure sensors used to measure absolute, gauge, or differential pressures. As part of the IEC 60747 series, it specifically addresses semiconductor devices with a focus on the performance, characteristics, terminology, and measurement methods for pressure sensors. IEC 60747-14-3:2009 ensures uniformity in terminology and test methods, supporting manufacturers and users in selecting and comparing semiconductor pressure sensors.

Key Topics

• Scope and Definitions: Covers the types and functions of semiconductor pressure sensors, including linear and on-off (switch) sensors. Outlines key terms such as absolute pressure, gauge pressure, differential pressure, reference pressure, burst pressure, and linearity error.

• Sensing Methods:

  • Piezoelectric sensing: Utilizes the piezoelectric effect to generate a voltage in response to applied pressure.
  • Piezoresistive sensing: Measures resistance changes under strain, common in silicon-based sensors.
  • Capacitive sensing: Uses changes in capacitance to detect diaphragm movement.
  • Silicon vibrating sensing: Measures frequency changes in a vibrating silicon element due to pressure.
  • Signal conditioning and temperature compensation: Describes integrated signal conditioning techniques and compensation for sensor temperature sensitivity.

• Essential Ratings and Characteristics:

  • Pressure ratings (maximum, burst, and over-pressure capability)
  • Temperature ratings (operating and storage)
  • Electrical ratings (supply voltage and current limits)
  • Sensor-specific metrics (sensitivity, offset, linearity, hysteresis, response time)

• Measurement Methods:

  • Procedures to determine output voltage, sensitivity, temperature coefficients, linearity, and hysteresis
  • Standard test circuits and guidance on maintaining test accuracy

• Recent Technical Update: The 2009 edition introduces Subclause 5.9 on the measurement method for linearity, enhancing the reliability of sensor evaluations.

Applications

Semiconductor pressure sensors standardized by IEC 60747-14-3:2009 are widely used across multiple industries that require accurate and reliable pressure measurement, including:

• Industrial automation: Process control, pneumatic systems, and fluid management
• Automotive: Engine management, tire pressure monitoring, and safety systems
• Medical devices: Blood pressure monitors, respiratory equipment, and infusion pumps
• Consumer electronics: Altimeters, weather stations, and smartphones
• Aerospace and defense: Altitude measurement, cabin pressure monitoring, and fuel system regulation

Adherence to IEC 60747-14-3:2009 helps ensure compatibility, performance consistency, and safety in these critical applications.

Related Standards

For proper implementation and cross-referencing, IEC 60747-14-3:2009 should be used alongside the following standards:

• IEC 60747-1:2006: Semiconductor devices - Part 1: General. This foundational standard provides terminology and general requirements relevant to all parts of the IEC 60747 series.
• IEC 60747-14-1:2000: Semiconductor devices - Part 14-1: Semiconductor sensors – General and classification. Offers broader context and classification for semiconductor sensor technologies.

Other applicable standards within the IEC 60747 series address additional types of semiconductor sensors, enabling comprehensive alignment with international best practices.

Keywords: IEC 60747-14-3:2009, semiconductor pressure sensors, absolute pressure sensor, gauge pressure, differential pressure, piezoresistive pressure sensor, piezoelectric pressure sensor, sensor linearity, industrial standards, sensor measurement methods, electrotechnical standardization.