IEC 60749-28:2022
Semiconductor devices - Mechanical and climatic test methods - Part 28: Electrostatic discharge (ESD) sensitivity testing - Charged device model (CDM) - device level
Semiconductor devices - Mechanical and climatic test methods - Part 28: Electrostatic discharge (ESD) sensitivity testing - Charged device model (CDM) - device level
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 147
- Дата публикации:
- 1 марта 2022 г.
- Издание:
- IEC IS 60749 edition 2 version 1
- ICS:
- 31.080.01
IEC 60749-28:2022 establishes the procedure for testing, evaluating, and classifying devices and microcircuits according to their susceptibility (sensitivity) to damage or degradation by exposure to a defined field-induced charged device model (CDM) electrostatic discharge (ESD). All packaged semiconductor devices, thin film circuits, surface acoustic wave (SAW) devices, opto-electronic devices, hybrid integrated circuits (HICs), and multi-chip modules (MCMs) containing any of these devices are to be evaluated according to this document. To perform the tests, the devices are assembled into a package similar to that expected in the final application. This CDM document does not apply to socketed discharge model testers. This document describes the field-induced (FI) method. An alternative, the direct contact (DC) method, is described in Annex J. The purpose of this document is to establish a test method that will replicate CDM failures and provide reliable, repeatable CDM ESD test results from tester to tester, regardless of device type. Repeatable data will allow accurate classifications and comparisons of CDM ESD sensitivity levels. This edition includes the following significant technical changes with respect to the previous edition: - a new subclause and annex relating to the problems associated with CDM testing of integrated circuits and discrete semiconductors in very small packages; - changes to clarify cleaning of devices and testers.
Abstract
Overview
IEC 60749-28:2022 is the international standard for device-level Charged Device Model (CDM) electrostatic discharge (ESD) sensitivity testing of semiconductor devices. It defines the field‑induced (FI) CDM test method (with a direct contact DC‑CDM alternative described in Annex J) to reliably reproduce CDM‑type failures and produce repeatable, comparable ESD sensitivity data across testers and laboratories. The scope covers packaged semiconductor devices, thin‑film circuits, SAW devices, opto‑electronic devices, hybrid integrated circuits (HICs) and multi‑chip modules (MCMs). Socketed discharge model testers are excluded.
Key topics and technical requirements
- Test purpose and scope: Procedures for testing, evaluating, and classifying device susceptibility to field‑induced CDM ESD.
- Required equipment: CDM ESD tester elements (current‑sensing element, ground plane, field plate and dielectric, charging resistor), waveform measurement hardware, verification modules (metal discs), capacitance meter and ohmmeter.
- Waveform capture & verification: Periodic tester qualification, quarterly and routine waveform verification, oscilloscope bandwidth considerations and waveform parameter recording.
- Test procedures: Device handling and preparation, test temperature and humidity requirements, charge delays for full charging, single/dual discharge procedures, and recording/reporting guidelines.
- Classification: Criteria and reporting format to classify ESDS (ESD sensitive) devices based on CDM test results.
- Special cases: New provisions for CDM testing of very small package integrated circuits and discrete semiconductors (Annex C) and clarified cleaning procedures for devices and testers.
- Alternatives & annexes: Annex J describes the direct contact (DC‑CDM) method; informative annexes provide hardware schematics, sample waveforms, and metrology guidance.
Practical applications
- Classifying semiconductor components for ESD robustness and supplier datasheet ratings.
- Reproducing CDM failure modes during qualification, reliability testing and failure analysis.
- Verifying and qualifying CDM test equipment and laboratory procedures to ensure consistent inter‑lab comparisons.
- Guiding ESD protection design and process controls in assembly/test environments to reduce field‑induced CDM failures.
Who should use this standard
- Semiconductor manufacturers and device test engineers
- Reliability and quality assurance teams at OEMs and EMS providers
- ESD test laboratories and accredited testing services
- Test equipment manufacturers and metrology specialists
- Failure analysis and reliability research groups
Related standards
Технические детали
- Технический комитет
- TC 47 - Semiconductor devices
- SKU
- IEC 60749-28:2022
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