IEC 62047-28:2017

Overview

IEC 62047-28:2017 defines a performance testing method for vibration‑driven MEMS electret energy harvesting devices. The standard specifies terms, test equipment, measurement procedures and reporting requirements to determine characteristic parameters (voltage, power, frequency/acceleration response) for consumer, industrial and other applications. It applies to MEMS-fabricated electret harvesters whose electrodes (gap < 1 000 μm) are covered by dielectric material with trapped charges, and manufactured by MEMS processes such as etching, photolithography or deposition.

Key Topics and Technical Requirements

• Scope and definitions: Clarifies terms like vibration frequency, vibration acceleration, amplitude and vibration direction specific to electret energy harvesters.
• Test equipment: Describes required blocks - DUT (device under test), vibration exciter, vibration controller, mounting bracket, vibration/acceleration detector, output detector and data recorder.
• Vibration control: Two control approaches allowed - constant amplitude control or constant acceleration control. Vibration direction must be within 2° of the device’s intended direction.
• Measurement accuracy: Output detector and related equipment must measure voltage/power within ±3% error and sample fast enough to capture waveform. Wiring should be short to minimize parasitic capacitance.
• Test conditions:
  • Waveform: Sinusoidal vibration.
  • Frequency: Constant during each test; frequency sweeps must be slow and include resonant frequency; record sweeps in both directions.
  • Acceleration: Constant during testing.
  • External load: Use a pure resistor of known value; measure parasitic capacitance of load and detector.
  • Testing time & environment: Long enough to stabilize electrical output; specified environmental conditions should be followed.
• Measuring procedures and reporting: Frequency response, acceleration response, external load conditions and full test report requirements are defined. Annex A gives an illustrative measurement example and numerical model.

Applications and Who Uses It

• MEMS designers and device manufacturers: For validating electret harvester performance, optimizing resonant frequency and power output.
• Test laboratories and quality engineers: To perform standardized, repeatable performance tests for product validation and batch testing.
• Research teams and system integrators: For comparing architectures (in‑plane comb drives, patterned electrets) and quantifying usable power under expected vibration conditions.
• Certification bodies and procurement: To verify vendor claims and define acceptance criteria for energy harvesting components used in IoT, low‑power sensors and industrial monitoring.

Related Standards

• Part of the IEC 62047 series on semiconductor MEMS devices. Users should consult other IEC 62047 parts (and device/system specific standards) for complementary testing and terminology.

Keywords: IEC 62047-28, vibration-driven MEMS, electret energy harvesting, performance testing method, vibration exciter, vibration frequency, vibration acceleration, DUT, MEMS fabrication.