IEC PAS 62204:2000
Standard method for measuring and using the temperature coefficient of resistance to determine the temperature of a metallization line
Standard method for measuring and using the temperature coefficient of resistance to determine the temperature of a metallization line
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Количество страниц:
- 25
- Дата публикации:
- 28 ноября 2000 г.
- Издание:
- IEC PAS 62204 edition 1 version 1
- ICS:
- 31.080.01
Aims at determining the temperature coefficient of resistance (at a given reference temperature) of aluminium and aluminium-alloy thin-film metallization that are used in microelectronic circuits and devices. This method is intended for estimating a mean temperature of a metallization line stressed in an accelerated electromigration stress test before any irreversible change in resistivity occurs due to the current-density and temperature stresses imposed.
Технические детали
- Технический комитет
- TC 47 - Semiconductor devices
- SKU
- IEC PAS 62204:2000
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