ISO 21501-4:2018
Determination of particle size distribution — Single particle light interaction methods — Part 4: Light scattering airborne particle counter for clean spaces
Determination of particle size distribution — Single particle light interaction methods — Part 4: Light scattering airborne particle counter for clean spaces
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 25
- Дата публикации:
- 18 мая 2018 г.
- Издание:
- ISO IS 21501 edition 2 version 1
- ICS:
- 19.120
This document describes a calibration and verification method for a light scattering airborne particle counter (LSAPC), which is used to measure the size distribution and particle number concentration of particles suspended in air. The light scattering method described in this document is based on single particle measurements. The typical size range of particles measured by this method is between 0,1 μm and 10 μm in particle size. Instruments that conform to this document are used for the classification of air cleanliness in cleanrooms and associated controlled environments in accordance with ISO 14644‑1 and ISO 14644‑2, as well as the measurement of number and size distribution of particles in various environments. The following parameters are within the scope of this document: — size setting error; — counting efficiency; — size resolution; — false count; — maximum particle number concentration; — sampling flow rate error; — sampling time error; — response rate; — calibration interval; — reporting results from test and calibration.
Abstract
Overview
ISO 21501-4:2018 specifies calibration and verification methods for light scattering airborne particle counters (LSAPC) used in clean spaces. The standard covers single-particle light interaction methods to measure particle size distribution and particle number concentration of airborne particles typically in the 0.1 µm to 10 µm range. It defines test procedures, performance requirements and reporting for instruments used in air cleanliness classification and monitoring.
Key topics and technical requirements
ISO 21501-4 focuses on performance attributes and test methods for LSAPCs. Key topics include:
- Measurement principle: particle sizing and counting by detection of light scattered when individual particles pass through a light beam (optical sizing based on scattered intensity; Mie theory applies for spherical particles).
- Calibration particles: use of monodisperse, traceable calibration particles (e.g., PSL) with certified mean size and refractive index (~1.59 at 589 nm) and low uncertainty (≤ 2.5%).
- Performance parameters within scope:
- Size setting error (MPE = 0.10, i.e., 10% of specified size) - verification and calibration requirements.
- Counting efficiency - required ranges: ~0.30–0.70 near the minimum detectable size and ~0.90–1.10 for particles 1.5–2× the minimum detectable size.
- Size resolution - maximum allowed resolution ≤ 0.15 (15%).
- False count - determination of counts in particle-free air and reporting of the 95% upper confidence limit (UCL).
- Maximum particle number concentration and associated coincidence loss evaluation.
- Sampling flow rate error, sampling time error, response rate, calibration interval, and reporting of test and calibration results.
- Test procedures and annexes: Clauses and informative annexes detail test methods for size setting, counting efficiency, size resolution, false counts, response rate and uncertainty estimation.
Practical applications and users
ISO 21501-4 is essential for ensuring reliable airborne particle measurements in:
- Cleanroom classification and monitoring (compliance with ISO 14644‑1 and ISO 14644‑2).
- Pharmaceutical manufacturing, semiconductor and electronics fabrication, medical device production, laboratory and aseptic environments.
- Users include cleanroom operators, quality assurance teams, instrument manufacturers, calibration laboratories, and regulatory bodies requiring traceable particle counter performance.
Related standards
- ISO 14644-1 / ISO 14644-2 (cleanroom classification and monitoring)
- Other parts of the ISO 21501 series (particle sizing and counting methods)
Keywords: ISO 21501-4, LSAPC, light scattering airborne particle counter, particle size distribution, cleanrooms, calibration, counting efficiency, size resolution, false count, ISO 14644.
Технические детали
- Технический комитет
- ISO/TC 24/SC 4 - Particle characterization
- SKU
- ISO 21501-4:2018
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