ISO 29301:2023
Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 44
- Дата публикации:
- 16 октября 2023 г.
- Издание:
- ISO IS 29301 edition 3 version 1
- ICS:
- 37.020
This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).
Abstract
Overview
ISO 29301:2023 - "Microbeam analysis - Analytical electron microscopy - Methods for calibrating image magnification by using reference materials with periodic structures" - specifies a standardized calibration procedure for image magnification in a transmission electron microscope (TEM). The standard applies to images recorded across a wide magnification range and to detectors such as photographic film, imaging plates, and digital image sensors (CCD/CMOS). It covers use of reference materials with periodic structures (diffraction grating replicas, super‑lattices, analysing crystals, crystal lattice images of carbon/gold/silicon) and includes scale bar calibration. ISO 29301:2023 is the third edition (minor revision) and does not apply to dedicated CD‑TEM or STEM instruments.
Key technical topics and requirements
- Scope and definitions: formal definitions for image magnification, image file, HFW (horizontal field width), CRM/RM, alignment and related TEM terms.
- Reference materials: requirements for certified reference materials (CRM) and reference materials (RM) with periodic structures, plus guidance on storage and handling.
- Calibration workflow: structured procedures covering mounting CRM/RM, setting TEM operating conditions, capturing digitized images, and digitizing photographic film or imaging plates.
- Measurement and digitization: procedures for selecting pixel resolution, digitizing reference scales (glass scale), and measuring angle‑corrected distances from digitized images.
- Calibration computations: methods to determine pixel size, calibrate scale units, calculate image magnification, and calibrate displayed scale bars.
- Quality and traceability: requirements for reporting, assessing accuracy, estimating measurement uncertainty, and producing a calibration report.
- Supporting material: annexes include parameters that influence magnification, flowcharts, guidance on averaging lines, reference material lists, and example test reports.
Practical applications and who uses this standard
ISO 29301:2023 is intended for:
- TEM operators and microscopy facilities performing quantitative imaging.
- Calibration and metrology laboratories seeking traceable magnification measurements.
- Research labs in materials science, semiconductors, nanotechnology, metallurgy, and biology that require accurate size measurements from TEM images.
- Quality assurance teams and instrument vendors validating instrument performance.
Benefits include reproducible magnification calibration, improved measurement traceability, consistent scale bar accuracy, and better comparability of TEM-based dimensional data.
Related standards
- ISO Guide 35 - Reference materials: characterization, homogeneity and stability.
- ISO/IEC 17025:2017 - Competence of testing and calibration laboratories.
- ISO 17034 - Competence of reference material producers.
Keywords: ISO 29301:2023, TEM magnification calibration, transmission electron microscope, reference materials, periodic structures, CRM, scale bar calibration, imaging plate, photographic film, image sensor.
Технические детали
- Технический комитет
- ISO/TC 202/SC 3 - Analytical electron microscopy
- SKU
- ISO 29301:2023
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