SIST EN ISO 14644-2:2016
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 22
- Дата публикации:
- 27 января 2016 г.
- ICS:
- 13.040.35
- Технический комитет:
- I13 - Imaginarni 13
ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
Abstract
Overview
EN ISO 14644-2:2015 - part of the ISO 14644 cleanroom series - specifies minimum requirements for a monitoring plan for cleanrooms and associated controlled environments. The standard focuses on providing evidence of cleanroom performance related to air cleanliness by particle concentration (particle size range 0.1 µm to 5 µm). It defines the principles for creating, implementing and maintaining monitoring programmes, based on risk assessment and operational needs. Note: the standard does not cover condition monitoring (e.g., vibration or general engineering maintenance) or ultrafine particles (
Технические детали
- SKU
- SIST EN ISO 14644-2:2016
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