ISO 10692-1:2001 PDF

Name: ISO 10692-1:2001 — Gas cylinders — Gas cylinder valve connections for use in the micro-electronics industry — Part 1: Outlet connections
SKU: ISO 10692-1:2001
Price: 25 EUR
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Gas cylinders — Gas cylinder valve connections for use in the micro-electronics industry — Part 1: Outlet connections

Название (английский):

ISO 10692-1:2001

Gas cylinders — Gas cylinder valve connections for use in the micro-electronics industry — Part 1: Outlet connections

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 17
Дата публикации:: 30 августа 2001 г.
Издание:: ISO IS 10692 edition 1 version 1
ICS:: 23.020.30

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Описание (английский):

La présente partie de l'ISO 10692 s'applique aux raccords de sortie des robinets de bouteilles à gaz pour gaz et mélanges de gaz et traite des exigences particulières à appliquer lorsqu'une propreté et une absence de particules maximales sont exigées dans le cadre de la fabrication des composants microélectroniques ou applications similaires.

Abstract

Похожие стандарты

Стандарты, упомянутые в описании

Overview

ISO 10692-1:2001 specifies gas cylinder valve outlet connections for the micro‑electronics industry where extreme cleanliness and particle‑free performance are required. Part 1 covers the geometry, materials, sealing components and performance requirements for outlet connections (including 630/640 and 710/720 series variants). The standard is focused on high‑purity and safety aspects for gases and gas mixtures used in semiconductor and related precision manufacturing.

Key topics and technical requirements

Scope and purpose: Outlet connections for refillable gas cylinders intended for micro‑electronics applications, with mandatory outlet allocations for many single gases (Annex A).

Materials and surface finish:

Valve and nipple recommended material: AISI 316L, microfinished, hardness ≥ 130 HBW (ISO 6506‑1).
Union nut recommended: AISI 304, silver‑plated threads.
Gasket typically Ni‑200 (nickel), fully annealed with hardness 80–100 HBW and sealing area surface finish ≤ 0.8 µm turned.

Sealing and leak performance:

The standard requires very low helium leak rates for both outboard and inboard leakage when tested at specified conditions (leak test pressure and tightening torque are defined in the document). Tests reference helium at 137 bar and a specified tightening torque (50 N·m) for performance verification.

Mechanical design and anti‑rotation:

Detailed assembly geometry, keys/keyways or pin anti‑rotation devices to prevent rotation during assembly.
Union nut designs include vent holes and provisions for blind plugs and retaining clips.

Dimensions and thread profile:

Detailed dimensional drawings for 630/640 and 710/720 series nipples, valves and union nuts.
Thread profile: 60° thread (per ISO 68‑2) with modified truncations; pitch P = 1.814 mm and specific nominal diameters listed.

Gasket, clip and blind plug: Dimensioned gasket and clip details plus instructions for transport blocking plugs (metal and organic gasket options).

Applications and users

Cylinder and valve manufacturers designing high‑purity gas fittings for semiconductor fabs.

OEMs of gas delivery equipment and tool builders in micro‑electronics.

Quality, safety and procurement teams specifying compatible, leak‑tight cylinder connections for ultra‑high‑purity gases and mixtures.

Gas suppliers and service companies providing cylinders for semiconductor, MEMS and nanofabrication processes.

This standard ensures interchangeability, contamination control, and safety for critical gas delivery in micro‑electronics manufacturing.

Related standards

ISO 10297 (refillable gas cylinder valves)

ISO 10156 (fire/oxidizing classification)

ISO 10298 (toxicity determination)

ISO 11114‑1 (material compatibility)

ISO 68‑2 (screw thread basic profile)

Keywords: ISO 10692-1, gas cylinder valve connections, micro‑electronics industry, outlet connections, high‑purity gas, helium leak rate, Ni‑200 gasket, AISI 316L, 630 series, 710 series.

ISO 10692-1:2001 PDF

Abstract

Похожие стандарты

Overview

Key topics and technical requirements

Applications and users

Related standards

Технические детали

SIST EN ISO 6506-1:2014

Metallic materials - Brinell hardness test - Part 1: Test method (ISO 6506-1:2014)

SIST ISO 6820:1997

Wheat flour and rye flour -- General guidance on the drafting of bread-making tests

BS EN ISO 10692-1:2001

Gas cylinders. Gas cylinder valve connections for use in the microelectronics industry. Outlet connections.

SIST EN ISO 10297:2024

Gas cylinders - Cylinder valves - Specification and type testing (ISO 10297:2024, Corrected version 2024-05)

SIST EN ISO 10156:2018

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ISO 10298:2018/Amd 1:2021

Gas cylinders — Gases and gas mixtures — Determination of toxicity for the selection of cylinder valve outlet…

ISO 11114-1:2020/Amd 1:2023

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