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1 Scope This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering. This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin fil…
Overview ISO 25164:2026 – Physical vapor deposition coatings - Magnetron sputtering deposition of TiAlSiN thin films - Specification is an international standard developed by ISO. It details the tech…